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Aluminum High Vacuum Angle Valve, Manual Type, Bellows Seal, XLH Series (Part Numbers)
- Volume Discount
A high vacuum angle valve with a pressure-balanced structure that enables an unrestricted exhaust direction.
[Features]
· Bellows type is particulate-free and cleaned.
· Low actuation torque (0.5 N·m or less).
· Spring provides a standard sealing load.
· Handle height remains the same regardless of whether valve is open or closed.
· Equipped as standard with an indicator for confirming if the valve is open or closed.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.
(i)Caution
- Refer to the manufacturer's catalog for specification and material details.
- CAD data is not available for some model numbers.
- Product images may be representative. Please refer to the manufacturer's catalog for shape details.
Part Number
Configured Part Number is shown.
| Part Number |
|---|
| XLH-16 |
| XLH-25 |
| XLH-25H5 |
| XLH-40 |
| XLH-50 |
| XLH-50H5 |
Loading...
Basic Information
| Type | Manual Vacuum Valve | Application | Single Item Operating | Installation method | Direct |
|---|---|---|---|---|---|
| Number of Ports | 2-Port Valve | Types of switching | 2-Position Normally Closed | Type of Piping Opening | Flange |
| Flange Type | KF | Seal Type | Bellows Seal | Seal material | FKM 1349-80 |
| Amount of leakage(Pa·m3/s) | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | Body Surface Treatment | External: hard anodized aluminum, Internal: base material | Seal Change Location | None |
- The specifications and dimensions of some parts may not be fully covered. For exact details, refer to manufacturer catalogs .
Additional Products in this Category
- Stainless Steel Valve, For Vacuums, NW Flange Ball Valve
- Aluminum High Vacuum Angle Valves, Normally Closed, Bellows Seal, XLA Series
- Aluminum High Vacuum Angle Valves, Normally Closed, O-Ring Seal, XLF Series
- Aluminum High Vacuum Angle Valves, Double Acting, O-Ring Seal, XLG Series
- Aluminum High Vacuum Angle Valve, 2-Step Control, Single Acting / Bellows Seal, O-Ring Seal, XLD Series
- Aluminum High Vacuum Angle Valve XLS Series (Electromagnetic Type, Bellows Pressure Balance)
- Stainless Steel High Vacuum Angle Valves / In-Line Valves, Double Acting / Bellows Seal, XMC/XYC Series
- Stainless Steel High Vacuum Angle Valves / In-Line Valve, 2-Stage Control, Single Acting / Bellows Seal, O-Ring Seal, XMD/XYD Series
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