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A high vacuum angle valve with a pressure-balanced structure that enables an unrestricted exhaust direction.
[Features]
· Bellows type is particulate-free and cleaned.
· Low actuation torque (0.5 N·m or less).
· Spring provides a standard sealing load.
· Handle height remains the same regardless of whether valve is open or closed.
· Equipped as standard with an indicator for confirming if the valve is open or closed.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.
Part Number
Configured Part Number is shown.
XLH-25
Type | Manual Vacuum Valve | Application | Single Item Operating | Installation method | Direct |
---|---|---|---|---|---|
Number of Ports | 2-Port Valve | Types of switching | 2-Position Normally Closed | Type of Piping Opening | Flange |
Flange Type | KF | Seal Type | Bellows Seal | Seal material | FKM 1349-80 |
Amount of leakage(Pa·m3/s) | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | Body Surface Treatment | External: hard anodized aluminum, Internal: base material | Seal Change Location | None |
Please check the type/dimensions/specifications of the part XLH-25 in the Aluminum High Vacuum Angle Valve, Manual Type, Bellows Seal, XLH Series series.
Part Number |
---|
XLH-16 |
XLH-25H5 |
XLH-40 |
XLH-50 |
XLH-50H5 |
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