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Aluminum High Vacuum Angle Valve, Manual Type, Bellows Seal, XLH Series (XLH-25H5)

Aluminum High Vacuum Angle Valve, Manual Type, Bellows Seal, XLH Series XLH-25H5
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A high vacuum angle valve with a pressure-balanced structure that enables an unrestricted exhaust direction.
[Features]
· Bellows type is particulate-free and cleaned.
· Low actuation torque (0.5 N·m or less).
· Spring provides a standard sealing load.
· Handle height remains the same regardless of whether valve is open or closed.
· Equipped as standard with an indicator for confirming if the valve is open or closed.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.

(i)Caution

  • Refer to the manufacturer's catalog for specification and material details.
  • CAD data is not available for some model numbers.
  • Product images may be representative. Please refer to the manufacturer's catalog for shape details.

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Part Number

Configured Part Number is shown.

XLH-25H5

Part Number
XLH-25H5
Part NumberMinimum order quantityVolume DiscountDays to Ship Flange Calls Sonic Conductance Heater Yes/No
1 Piece(s)Available

Quote

2514L/SWith heater for 120℃

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Basic Information

Type Manual Vacuum Valve Application Single Item Operating Installation method Direct
Number of Ports 2-Port Valve Types of switching 2-Position Normally Closed Type of Piping Opening Flange
Flange Type KF Seal Type Bellows Seal Seal material FKM 1349-80
Amount of leakage(Pa·m3/s) Internal: 1.3 × 10-10, External: 1.3 × 10-11 Body Surface Treatment External: hard anodized aluminum, Internal: base material Seal Change Location None

Please check the type/dimensions/specifications of the part XLH-25H5 in the Aluminum High Vacuum Angle Valve, Manual Type, Bellows Seal, XLH Series series.

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