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[Features]
· Aluminum body
· Uniform baking temperature
· Lightweight and compact
· Low outgassing
· Little heavy metal contamination
· Resistant to fluorine corrosion
· Replaceable bellows (bellows-seal type)
Part Number
Configured Part Number is shown.
Type | Pilot Vacuum Valve | Application | Single Item Operating | Installation method | Direct |
---|---|---|---|---|---|
Number of Ports | 2-Port Valve | Types of switching | 2-Position Normally Closed | Type of Piping Opening | Flange |
Flange Type | KF | Flange Calls | 25 | Seal Type | Elastic Seal |
Pilot Port Direction | Flange side | Temperature Range(°C) | 5 to 60 | Number of Switches | No auto switch |
Seal material | FKM 1349-80 | Amount of leakage(Pa·m3/s) | Internal: 1.3 × -10, External: 1.3 × -10 | Body Surface Treatment | External: hard anodized aluminum, Internal: base material |
Seal Change Location | None | Heater Yes/No | None |
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