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High Vacuum Degree Class Compatible Type Switch
- Volume Discount
10-5 Pa High vacuum class compatible contact switch.
[Features]
-Positioning switch for high vacuum environment, manufactured only with low-outgas compatible parts.
[Application]
-For detecting the presence or absence of semiconductor wafers in vacuum chambers.
-Glass substrate for vacuum film deposition equipment and photovoltaic (PV) vacuum equipment.
-For positioning the glass substrate of vacuum film deposition equipment for FPDs, detecting tray seating of masks, and finding the origin of carriers.
-Adopted one after another by major semiconductor manufacturing equipment manufacturers
| Part Number |
|---|
| GN-PT5M3A |
| GN-PT5M3A-R |
| GN-PT5M3B |
| GN-PT5M3B-R |
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Basic Information
| Type | Pin stroke shape/Spring Plungers Type | Main Body Shape | Bolt Type | Tip shape | R Contact |
|---|---|---|---|---|---|
| Environment | Vacuum | Body Material | 304 Stainless Steel | Contact Material | SUS HRC45 |
| Stroke(mm) | 1.5 | Nominal of Thread (M) | M5×0.5 | Repeatability | 0.003mm |
| Contact Force(N) | 0.5 | Contact point accuracy life(x 10K times) | 300 | Tip diameter | Ø1.5 |
| Protection Structure | IP40 | LED | No | Compatible vacuum strength | 10^-5Pa |
| Allowable backing temperature | 120℃ |
Specification/Dimensions
-
Contact Point Type
- Contact type NO
- Contact type NC
-
Operating Point(mm)
-
Cord direction
- Perpendicularity
- Straight
-
type
- GN-PT5M3A
- GN-PT5M3A-R
- GN-PT5M3B
- GN-PT5M3B-R
Days to Ship
-
- All
- 8 Days or Less
- 16 Days or Less
- 26 Days or Less
Specify Alterations
- The specifications and dimensions of some parts may not be fully covered. For exact details, refer to manufacturer catalogs .
Additional Products in this Category
- Contact Switches - Threaded, Standard
- Contact Switches - Threaded, L-Shaped
- Contact Switches- Wide Contact Angle Type
- Contact Switches - High Accuracy, Tip Shape Selectable
- Contact Switches - Hall Effect Point Type - 2 Signals
- Contact Switches - Threaded
- Contact Switches - Compact
- CS-touch switch for deflection CSH
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