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Motorized XYZ-Axis Stages - Linear Ball, Stroke 30-50 mm, XYZCVL Series (Part Numbers)

New Products
Volume Discount

MISUMI

High rigidity and compact width; 30~50mm travel distance.

inCAD Components

(i)Caution

There is a change in the motor model due to the end of production of the servo motor of the current specification.
The servo motor option symbol after the change will be "UA" and the servo motor option symbol "U" of the current specification will be discontinued as the end of July 2019.
Discontinuance Notification and New Product Introduction of Stepper Motor Driver and Servo Motor for MISUMI Motorized Stage
Delivery times for some of our products may be delayed as national government authorities have imposed limit of capacity at our production sites.

Part Number

Configured Part Number is shown.

Drawing/Specifications
3D Preview
Part Numbers
More Information
Catalog

[Motorized] XYZ-Axis - Linear Ball - Stroke 30~50:Related Image

[ ! ]The above diagrams are for stages incorporating Motor C. For detailed dimensions about stages incorporating Motor F, G, MA, PA or U, see the relevant CAD data.

[ M ] Material: SUS440C
[ S ] Surface Treatment: Electroless Nickel Plating
[ A ] Accessory: SCB4-14 (8 pcs.)

Specifications

Part Number	-	Lead	-	Sensor	-	Motor	-	Cable
XYZCVL630	-	1	-	N	-	C	-	N

Part Number	Lead	Sensor (Origin Sensor Position)	Mechanical Specifications
			Table Size	Travel Distance	Weight^*^１	Load Capacity

XYZCVL630 (w/o Cover) XYZCVLC630 (with Cover)	1 (Lead 1mm)	N (W/o Sensor) 1 (CCW Right) 2 (CCW Left) 3 (Right-center) 4 (Left-center) 5 (CW Right) 6 (CW Left) [ ! ]Limit Sensors are built-in.	60×60 mm	30 mm	4.56 kg (4.74 kg^*^２ )	7 kgf [68.6 N]

XYZCVL650 (w/o Cover) XYZCVLC650 (with Cover)				50 mm	4.92 kg (5.04 kg^*^２ )

*1. This is the value when the Motor Option "C" is selected.
*2. When the “With Cover” option is selected.

Mechanical Specifications by Motor Type						Notes
Motor (and Driver or Amplifier)		Cable	Lead : 1mm		Motor Weight (per piece)	Motor Molel	Driver / Amplifier Molel		Dedicated Controller
Motor (and Driver or Amplifier)		Cable	Resolution	Max. Speed	Motor Weight (per piece)	Motor Molel	Original Manufacturer Model	Misumi Model^*9	Dedicated Controller
2-Phase Stepper Motor	*PA^4** (With Encoder)	*P^4**	1 μm (At 1000 P/R)	40 mm / sec	0.15 kg	ARM24SAK (ORIENTAL MOTOR Co.,Lrd.)	ARD-K (ORIENTAL MOTOR Co.,Lrd.)	―	―
5-Phase Stepper Motor	*C^3** (Standard)	*N^5**	2 μm^*6	20 mm / sec	0.11 kg	C005C-90215P-1 (ORIENTAL MOTOR Co.,Lrd.)	*Reccomended Model	*Reccomended Model	Stand-alone Type : "MSCTL102" series
	*F^3** (High Torque)		2 μm^*6	30 mm / sec	0.20 kg	PK525HPB-C1 (ORIENTAL MOTOR Co.,Lrd.)	Full / Half step : SD5107P3-A22 (ORIENTAL MOTOR Co.,Lrd.)	Full / Half step : MSDR24-N
	*G^3** (High Resolution)		1 μm^*6	15 mm / sec	0.11 kg	PK523HPMB-C1 (ORIENTAL MOTOR Co.,Lrd.)	Microstepping : DFC5107P (ORIENTAL MOTOR Co.,Lrd.)	Microstepping : MSDR24-MS	Built-in Type : "MSCTL112" series
	*MA^4** (With Electromagnetic Brake)	*M^4**	2 μm^*6	25 mm / sec	0.52 kg	PKE545MC-A1 (ORIENTAL MOTOR Co.,Lrd.)	RKSD503M-A (ORIENTAL MOTOR Co.,Lrd.)	―	―
AC Servo Motor	*UA^4**	*U^4**	― (18 Bit Encoder)	50 mm / sec	0.35 kg	HF-KP053 (Mitsubishi Electric Corporation)	MR-J3-10A (Mitsubishi Electric Corporation)	―	―

*3. Driver is not included. It is sold separately. Please refer to "MSDR" series.
*4. When the Motor Option "MA", "PA" or "UA" is selected, the driver or amplifier is included with as the Set. In addition, Cable Option "M", "P" or "U" as the dedicated cable is needed to select.
*5. When the Cable Option N, the cable is sold separately. Please refer to "MSCB" series.
*6. This value is at Full Step.
*7. Same product with Original Manufacturer Model.

Part Number

CAD Data download and 3D preview are not available because the part number has not yet been determined.

*In order to open the CAD Data download and 3D preview screen, the part number must be fixed.
Please confirm the part number from "Specification / Dimension"on the left side, and then perform the CAD Data Download / 3D Preview operation.

CAD Download

: 30; 60; 90

Part Number
XYZCVL630-1-1-C-N
XYZCVL630-1-1-F-N
XYZCVL630-1-1-G-N
XYZCVL630-1-1-MA-M
XYZCVL630-1-1-PA-P
XYZCVL630-1-2-C-N
XYZCVL630-1-2-F-N
XYZCVL630-1-2-G-N
XYZCVL630-1-2-MA-M
XYZCVL630-1-2-PA-P
XYZCVL630-1-3-C-N
XYZCVL630-1-3-F-N
XYZCVL630-1-3-G-N
XYZCVL630-1-3-MA-M
XYZCVL630-1-3-PA-P
XYZCVL630-1-4-C-N
XYZCVL630-1-4-F-N
XYZCVL630-1-4-G-N
XYZCVL630-1-4-MA-M
XYZCVL630-1-4-PA-P
XYZCVL630-1-5-C-N
XYZCVL630-1-5-F-N
XYZCVL630-1-5-G-N
XYZCVL630-1-5-MA-M
XYZCVL630-1-5-PA-P
XYZCVL630-1-6-C-N
XYZCVL630-1-6-F-N
XYZCVL630-1-6-G-N
XYZCVL630-1-6-MA-M
XYZCVL630-1-6-PA-P
XYZCVL630-1-N-C-N
XYZCVL630-1-N-F-N
XYZCVL630-1-N-G-N
XYZCVL630-1-N-MA-M
XYZCVL630-1-N-PA-P
XYZCVL650-1-1-C-N
XYZCVL650-1-1-F-N
XYZCVL650-1-1-G-N
XYZCVL650-1-1-MA-M
XYZCVL650-1-1-PA-P
XYZCVL650-1-2-C-N
XYZCVL650-1-2-F-N
XYZCVL650-1-2-G-N
XYZCVL650-1-2-MA-M
XYZCVL650-1-2-PA-P
XYZCVL650-1-3-C-N
XYZCVL650-1-3-F-N
XYZCVL650-1-3-G-N
XYZCVL650-1-3-MA-M
XYZCVL650-1-3-PA-P
XYZCVL650-1-4-C-N
XYZCVL650-1-4-F-N
XYZCVL650-1-4-G-N
XYZCVL650-1-4-MA-M
XYZCVL650-1-4-PA-P
XYZCVL650-1-5-C-N
XYZCVL650-1-5-F-N
XYZCVL650-1-5-G-N
XYZCVL650-1-5-MA-M
XYZCVL650-1-5-PA-P
XYZCVL650-1-6-C-N
XYZCVL650-1-6-F-N
XYZCVL650-1-6-G-N
XYZCVL650-1-6-MA-M
XYZCVL650-1-6-PA-P
XYZCVL650-1-N-C-N
XYZCVL650-1-N-F-N
XYZCVL650-1-N-G-N
XYZCVL650-1-N-MA-M
XYZCVL650-1-N-PA-P
XYZCVLC630-1-1-C-N
XYZCVLC630-1-1-F-N
XYZCVLC630-1-1-G-N
XYZCVLC630-1-1-MA-M
XYZCVLC630-1-1-PA-P
XYZCVLC630-1-2-C-N
XYZCVLC630-1-2-F-N
XYZCVLC630-1-2-G-N
XYZCVLC630-1-2-MA-M
XYZCVLC630-1-2-PA-P
XYZCVLC630-1-3-C-N
XYZCVLC630-1-3-F-N
XYZCVLC630-1-3-G-N
XYZCVLC630-1-3-MA-M
XYZCVLC630-1-3-PA-P
XYZCVLC630-1-4-C-N
XYZCVLC630-1-4-F-N
XYZCVLC630-1-4-G-N
XYZCVLC630-1-4-MA-M
XYZCVLC630-1-4-PA-P

Minimum order quantity	Volume Discount	Days to Ship	Motor, Motor Characteristics	Stroke (X Distance) (mm)	Stroke (Y Distance) (mm)	Stroke (Z Distance) (mm)	Maximum Velocity (mm/sec)	Cover	Sensor selection	Cable Option
1 Piece(s)	Available	15 Days or more	5-Phase Stepping Motor	30	30	30	20	Without Cover	1	Cable not included
1 Piece(s)	Available	15 Days or more	5-Phase Stepping Motor High Torque	30	30	30	30	Without Cover	1	Cable not included
1 Piece(s)	Available	15 Days or more	5-Phase Stepping Motor High Resolution	30	30	30	20	Without Cover	1	Cable not included
1 Piece(s)	Available	15 Days or more	With 5-Phase Stepping Motor Brake	30	30	30	20	Without Cover	1	Cable for Brake Mounting
1 Piece(s)	Available	15 Days or more	α Stepping Motor	30	30	30	20	Without Cover	1	Cable for α-Step Motor
1 Piece(s)	Available	15 Days or more	5-Phase Stepping Motor	30	30	30	20	Without Cover	2	Cable not included
1 Piece(s)	Available	15 Days or more	5-Phase Stepping Motor High Torque	30	30	30	30	Without Cover	2	Cable not included
1 Piece(s)	Available	15 Days or more	5-Phase Stepping Motor High Resolution	30	30	30	20	Without Cover	2	Cable not included
1 Piece(s)	Available	15 Days or more	With 5-Phase Stepping Motor Brake	30	30	30	20	Without Cover	2	Cable for Brake Mounting
1 Piece(s)	Available	15 Days or more	α Stepping Motor	30	30	30	20	Without Cover	2	Cable for α-Step Motor
1 Piece(s)	Available	15 Days or more	5-Phase Stepping Motor	30	30	30	20	Without Cover	3	Cable not included
1 Piece(s)	Available	15 Days or more	5-Phase Stepping Motor High Torque	30	30	30	30	Without Cover	3	Cable not included
1 Piece(s)	Available	15 Days or more	5-Phase Stepping Motor High Resolution	30	30	30	20	Without Cover	3	Cable not included
1 Piece(s)	Available	15 Days or more	With 5-Phase Stepping Motor Brake	30	30	30	20	Without Cover	3	Cable for Brake Mounting
1 Piece(s)	Available	15 Days or more	α Stepping Motor	30	30	30	20	Without Cover	3	Cable for α-Step Motor
1 Piece(s)	Available	15 Days or more	5-Phase Stepping Motor	30	30	30	20	Without Cover	4	Cable not included
1 Piece(s)	Available	15 Days or more	5-Phase Stepping Motor High Torque	30	30	30	30	Without Cover	4	Cable not included
1 Piece(s)	Available	15 Days or more	5-Phase Stepping Motor High Resolution	30	30	30	20	Without Cover	4	Cable not included
1 Piece(s)	Available	15 Days or more	With 5-Phase Stepping Motor Brake	30	30	30	20	Without Cover	4	Cable for Brake Mounting
1 Piece(s)	Available	15 Days or more	α Stepping Motor	30	30	30	20	Without Cover	4	Cable for α-Step Motor
1 Piece(s)	Available	15 Days or more	5-Phase Stepping Motor	30	30	30	20	Without Cover	5	Cable not included
1 Piece(s)	Available	15 Days or more	5-Phase Stepping Motor High Torque	30	30	30	30	Without Cover	5	Cable not included
1 Piece(s)	Available	15 Days or more	5-Phase Stepping Motor High Resolution	30	30	30	20	Without Cover	5	Cable not included
1 Piece(s)	Available	15 Days or more	With 5-Phase Stepping Motor Brake	30	30	30	20	Without Cover	5	Cable for Brake Mounting
1 Piece(s)	Available	15 Days or more	α Stepping Motor	30	30	30	20	Without Cover	5	Cable for α-Step Motor
1 Piece(s)	Available	15 Days or more	5-Phase Stepping Motor	30	30	30	20	Without Cover	6	Cable not included
1 Piece(s)	Available	15 Days or more	5-Phase Stepping Motor High Torque	30	30	30	30	Without Cover	6	Cable not included
1 Piece(s)	Available	15 Days or more	5-Phase Stepping Motor High Resolution	30	30	30	20	Without Cover	6	Cable not included
1 Piece(s)	Available	15 Days or more	With 5-Phase Stepping Motor Brake	30	30	30	20	Without Cover	6	Cable for Brake Mounting
1 Piece(s)	Available	15 Days or more	α Stepping Motor	30	30	30	20	Without Cover	6	Cable for α-Step Motor
1 Piece(s)	Available	15 Days or more	5-Phase Stepping Motor	30	30	30	20	Without Cover	N	Cable not included
1 Piece(s)	Available	15 Days or more	5-Phase Stepping Motor High Torque	30	30	30	30	Without Cover	N	Cable not included
1 Piece(s)	Available	15 Days or more	5-Phase Stepping Motor High Resolution	30	30	30	20	Without Cover	N	Cable not included
1 Piece(s)	Available	15 Days or more	With 5-Phase Stepping Motor Brake	30	30	30	20	Without Cover	N	Cable for Brake Mounting
1 Piece(s)	Available	15 Days or more	α Stepping Motor	30	30	30	20	Without Cover	N	Cable for α-Step Motor
1 Piece(s)	Available	15 Days or more	5-Phase Stepping Motor	50	50	50	20	Without Cover	1	Cable not included
1 Piece(s)	Available	15 Days or more	5-Phase Stepping Motor High Torque	50	50	50	30	Without Cover	1	Cable not included
1 Piece(s)	Available	15 Days or more	5-Phase Stepping Motor High Resolution	50	50	50	20	Without Cover	1	Cable not included
1 Piece(s)	Available	15 Days or more	With 5-Phase Stepping Motor Brake	50	50	50	20	Without Cover	1	Cable for Brake Mounting
1 Piece(s)	Available	15 Days or more	α Stepping Motor	50	50	50	20	Without Cover	1	Cable for α-Step Motor
1 Piece(s)	Available	15 Days or more	5-Phase Stepping Motor	50	50	50	20	Without Cover	2	Cable not included
1 Piece(s)	Available	15 Days or more	5-Phase Stepping Motor High Torque	50	50	50	30	Without Cover	2	Cable not included
1 Piece(s)	Available	15 Days or more	5-Phase Stepping Motor High Resolution	50	50	50	20	Without Cover	2	Cable not included
1 Piece(s)	Available	15 Days or more	With 5-Phase Stepping Motor Brake	50	50	50	20	Without Cover	2	Cable for Brake Mounting
1 Piece(s)	Available	15 Days or more	α Stepping Motor	50	50	50	20	Without Cover	2	Cable for α-Step Motor
1 Piece(s)	Available	15 Days or more	5-Phase Stepping Motor	50	50	50	20	Without Cover	3	Cable not included
1 Piece(s)	Available	15 Days or more	5-Phase Stepping Motor High Torque	50	50	50	30	Without Cover	3	Cable not included
1 Piece(s)	Available	15 Days or more	5-Phase Stepping Motor High Resolution	50	50	50	20	Without Cover	3	Cable not included
1 Piece(s)	Available	15 Days or more	With 5-Phase Stepping Motor Brake	50	50	50	20	Without Cover	3	Cable for Brake Mounting
1 Piece(s)	Available	15 Days or more	α Stepping Motor	50	50	50	20	Without Cover	3	Cable for α-Step Motor
1 Piece(s)	Available	15 Days or more	5-Phase Stepping Motor	50	50	50	20	Without Cover	4	Cable not included
1 Piece(s)	Available	15 Days or more	5-Phase Stepping Motor High Torque	50	50	50	30	Without Cover	4	Cable not included
1 Piece(s)	Available	15 Days or more	5-Phase Stepping Motor High Resolution	50	50	50	20	Without Cover	4	Cable not included
1 Piece(s)	Available	15 Days or more	With 5-Phase Stepping Motor Brake	50	50	50	20	Without Cover	4	Cable for Brake Mounting
1 Piece(s)	Available	15 Days or more	α Stepping Motor	50	50	50	20	Without Cover	4	Cable for α-Step Motor
1 Piece(s)	Available	15 Days or more	5-Phase Stepping Motor	50	50	50	20	Without Cover	5	Cable not included
1 Piece(s)	Available	15 Days or more	5-Phase Stepping Motor High Torque	50	50	50	30	Without Cover	5	Cable not included
1 Piece(s)	Available	15 Days or more	5-Phase Stepping Motor High Resolution	50	50	50	20	Without Cover	5	Cable not included
1 Piece(s)	Available	15 Days or more	With 5-Phase Stepping Motor Brake	50	50	50	20	Without Cover	5	Cable for Brake Mounting
1 Piece(s)	Available	15 Days or more	α Stepping Motor	50	50	50	20	Without Cover	5	Cable for α-Step Motor
1 Piece(s)	Available	15 Days or more	5-Phase Stepping Motor	50	50	50	20	Without Cover	6	Cable not included
1 Piece(s)	Available	15 Days or more	5-Phase Stepping Motor High Torque	50	50	50	30	Without Cover	6	Cable not included
1 Piece(s)	Available	15 Days or more	5-Phase Stepping Motor High Resolution	50	50	50	20	Without Cover	6	Cable not included
1 Piece(s)	Available	15 Days or more	With 5-Phase Stepping Motor Brake	50	50	50	20	Without Cover	6	Cable for Brake Mounting
1 Piece(s)	Available	15 Days or more	α Stepping Motor	50	50	50	20	Without Cover	6	Cable for α-Step Motor
1 Piece(s)	Available	15 Days or more	5-Phase Stepping Motor	50	50	50	20	Without Cover	N	Cable not included
1 Piece(s)	Available	15 Days or more	5-Phase Stepping Motor High Torque	50	50	50	30	Without Cover	N	Cable not included
1 Piece(s)	Available	15 Days or more	5-Phase Stepping Motor High Resolution	50	50	50	20	Without Cover	N	Cable not included
1 Piece(s)	Available	15 Days or more	With 5-Phase Stepping Motor Brake	50	50	50	20	Without Cover	N	Cable for Brake Mounting
1 Piece(s)	Available	15 Days or more	α Stepping Motor	50	50	50	20	Without Cover	N	Cable for α-Step Motor
1 Piece(s)	Available	15 Days or more	5-Phase Stepping Motor	30	30	30	20	With Cover	1	Cable not included
1 Piece(s)	Available	15 Days or more	5-Phase Stepping Motor High Torque	30	30	30	30	With Cover	1	Cable not included
1 Piece(s)	Available	15 Days or more	5-Phase Stepping Motor High Resolution	30	30	30	20	With Cover	1	Cable not included
1 Piece(s)	Available	15 Days or more	With 5-Phase Stepping Motor Brake	30	30	30	20	With Cover	1	Cable for Brake Mounting
1 Piece(s)	Available	15 Days or more	α Stepping Motor	30	30	30	20	With Cover	1	Cable for α-Step Motor
1 Piece(s)	Available	15 Days or more	5-Phase Stepping Motor	30	30	30	20	With Cover	2	Cable not included
1 Piece(s)	Available	15 Days or more	5-Phase Stepping Motor High Torque	30	30	30	30	With Cover	2	Cable not included
1 Piece(s)	Available	15 Days or more	5-Phase Stepping Motor High Resolution	30	30	30	20	With Cover	2	Cable not included
1 Piece(s)	Available	15 Days or more	With 5-Phase Stepping Motor Brake	30	30	30	20	With Cover	2	Cable for Brake Mounting
1 Piece(s)	Available	15 Days or more	α Stepping Motor	30	30	30	20	With Cover	2	Cable for α-Step Motor
1 Piece(s)	Available	15 Days or more	5-Phase Stepping Motor	30	30	30	20	With Cover	3	Cable not included
1 Piece(s)	Available	15 Days or more	5-Phase Stepping Motor High Torque	30	30	30	30	With Cover	3	Cable not included
1 Piece(s)	Available	15 Days or more	5-Phase Stepping Motor High Resolution	30	30	30	20	With Cover	3	Cable not included
1 Piece(s)	Available	15 Days or more	With 5-Phase Stepping Motor Brake	30	30	30	20	With Cover	3	Cable for Brake Mounting
1 Piece(s)	Available	15 Days or more	α Stepping Motor	30	30	30	20	With Cover	3	Cable for α-Step Motor
1 Piece(s)	Available	15 Days or more	5-Phase Stepping Motor	30	30	30	20	With Cover	4	Cable not included
1 Piece(s)	Available	15 Days or more	5-Phase Stepping Motor High Torque	30	30	30	30	With Cover	4	Cable not included
1 Piece(s)	Available	15 Days or more	5-Phase Stepping Motor High Resolution	30	30	30	20	With Cover	4	Cable not included
1 Piece(s)	Available	15 Days or more	With 5-Phase Stepping Motor Brake	30	30	30	20	With Cover	4	Cable for Brake Mounting
1 Piece(s)	Available	15 Days or more	α Stepping Motor	30	30	30	20	With Cover	4	Cable for α-Step Motor

More Information

■Motor/Cable Application Table

Motor	Cable
C,F,G	N (Not Provided)
MA	M
PA	P
UA	U

[ ! ]For the cable for C, F or G, see MSCB_ on P.1-1735-95

■Max. Speed

Motor	(mm/sec)
C	20
F	30
G	15
MA	25
PA	40
UA	50

[ ! ]Note that the speed and positioning time differ depending on the current condition of use.
The speed and positioning time are not guaranteed values but reference values provided by MISUMI.

■Common Specifications

Feed Screw		Ball Screw Ø8, Lead 1
Guide		Linear Ball Guide
Resolution	Full	2µm
	Half	1µm
	Fine(At 1/20)	0.1µm
Max. Speed		20mm/sec
Positioning repeatability		±0.5µm
Load Capacity^*4		68.6N
Lost Motion		1µm
Backlash		1µm
Straightness		3µm
Parallelism		15µm
Motion Parallelism		10µm

[ ! ]

The value differs depending on the type of motor. For details, see P.1-1735-15
[ ! ]The above specifications table is for a single axis stage placed flatly. *4. The above load capacity value is for Z-Axis.

■Electrical Specifications

Motor		C	F	G	MA	PA	UA
		Standard	High Torque	High Resolution	With Brake	Stepping-out Prevention	High Speed
Motor	Type	5-Phase Stepping Motor 0.75A/Phase				α-Step Motor	AC Servo Motor
	Step Angle	0.72°	0.72°	0.36°	0.72°	0.36° (When 1000P/R is set)	18-bit Encoder (262144P/R)
Connector	Applicable Receptacle Connector	HR10A-10P-12S (73) (Hirose Electric Co., LTD.)			5559-06R-210 (Molex Japan LLC)	43020-1000 (Molex Japan LLC)	Motor Cable JN4FT04SJ1-R (Japan Aviation Electronics Industry, Ltd.)
							Encoder: 1674320-1 (Tyco Electronics Japan G.K.)
Sensor	Limit Sensor	Provided
	Home Sensor	Not Provided by standard (Photomicrosensor PM-L25 (Panasonic Industrial Devices SUNX Co., Ltd.) is available as the option.)
	Near Home Sensor	-
	Power Supply Voltage	DC5~24V±10%
	Current Consumption	45mA or less (15mA or less per sensor)
	Control Output	NPN Open Collector Output DC30V or less, 50mA or less Residual Voltage 2V or less (when load current is 50mA) Residual Voltage 1V or less (when load current is 16mA)
	Output Logic	Detecting (Dark): Output Transistor OFF (Non-Conducting)

[ ! ]Sensors with Part Number PM-□24 are to be discontinued and replaced by next-generation products with Part Number PM-□25 from April 2017.

■Recommended Homing Method (Homing Timing Control Reference)

Type5	After detection is executed in the CCW direction, the process of detecting in the CW direction is begun based on the CCWLS signal.
Type6	After detection is executed in the CW direction, the process of detecting in the CCW direction is begun based on the CWLS signal.
Type11	After Type 5 is executed, the process of detecting in the CCW direction is begun based on the TIMING signal.
Type12	After Type 6 is executed, the process of detecting in the CW direction is begun based on the TIMING signal.

Product TOP

Basic Information

Type	XYZ Axis Stage	Material	440C Stainless Steel	Guide	Linear Ball Guide
Table feeding methods	Ball screw	Table Length(mm)	60	Table width(mm)	60
Z-Axis Stage Surface	Vertical	Surface Treatment	Electroless Nickel Plating	Through Hole (Table Center Hole)	No
Load Capacity (Range)(N)	50.1~100	Allowable Load(N)	68.6	Positioning Accuracy(µm)	5
Table Straightness(µm)	3	Moment Rigidity (Pitching)("/N·cm)	0.05	Moment Rigidity (Yawing)("/N·cm)	0.05
Moment Rigidity (Rolling)("/N·cm)	0.05	Sensors	Limit (Home can be option specified)

Configure

140 Part Numbers

View Part Numbers

Configure Remaining Specifications

Completed

Specification/Dimensions

Motor, Motor Characteristics
- 5-Phase Stepping Motor
- 5-Phase Stepping Motor High Torque
- 5-Phase Stepping Motor High Resolution
- With 5-Phase Stepping Motor Brake
- α Stepping Motor
Clear
Stroke (X Distance)(mm)
30

50
Clear
Stroke (Y Distance)(mm)
30

50
Clear
Stroke (Z Distance)(mm)
30

50
Clear
Cover
- With Cover
- Without Cover
Clear
Sensor selection
1

2

3

4

5

6

N
Clear
Cable Option
- Cable for Brake Mounting
- Cable for α-Step Motor
- Cable not included
Clear
type
- XYZCVL
- XYZCVLC
Clear
CAD
- 2D
- 3D
Clear