SMC Vacuum Valves

• 

  Vacuum Assist Valve ZP2V Series

  SMC

  A vacuum valve which inhibits drops in vacuum pressure, even when no workpiece is present.
  [Features]
  · Keeps hold of workpieces when multiple vacuum pads are used by a single vacuum generator.
  · Protects against drops in vacuum pressure, even when some pads are not suctioning.
  · Single-action fitting models now also available.
  · No need for switching the operation when changing out workpieces.
  · Allows the simplification of control circuits when workpieces have different shapes.
  · Fixed orifice size: 0.3 mm, 0.5 mm, 0.7 mm, 1 mm.

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  Aluminum High Vacuum Angle Valves, Normally Closed, Bellows Seal, XLA Series

  SMC

  Vacuum regulator with low outgassing.
  [Features]
  · Aluminum body.
  · Replaceable bellows.
  · Uniform baking temperature.
  · Lightweight and compact.
  · Little heavy metal contamination.

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• 

  Normally Closed Type High Vacuum Solenoid Valve XSA Series (XSA1/XSA2/XSA3)

  SMC

  A normally closed type high vacuum solenoid valve with reduced particulate matter and improved sealing performance.
  [Features]
  · Flame-retardant (UL94V-0 compliant).
  · Two types of fittings (face seal fitting and compression fitting) and female threads (Rc, NPT) are available.
  · Moving the spring from the sliding part of the armature iron core to the body reduces the generation of particulate matter caused by contact with the spring.
  · Improved sealing performance, securely sealing with its powerful spring.
  · Power consumption: 4.5 W (size 1) / 7 W (size 2) / 10.5 W (size 3).
  *For DC specification / class B.

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• 

  Aluminum High Vacuum Angle Valve XLS Series (Electromagnetic Type, Bellows Pressure Balance)

  SMC

  A high vacuum angle valve that requires no air to drive, enabling use in portable equipment.
  [Features]
  · Uses no sliding metal parts, minimizing particulate matter.
  · The pressure balance mechanism allows an unrestricted exhaust direction.
  · A control power supply circuit for solenoid valve drive is now standard.
  · Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
  · Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
  · Low sputtering yield minimizes heavy metal contamination of wafers.

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• 

  Stainless Steel High Vacuum Angle Valves / In-Line Valves, Double Acting / Bellows Seal, XMC/XYC Series

  SMC

  Vacuum valve with precision-cast single-piece structure which helps prevent gas accumulation.
  [Features]
  · Bellows type is particulate-free and cleaned.
  · Pressure balanced structure.
  · Body material: SCS13 (SUS304 equivalent).
  · The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.

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• 

  Aluminum High Vacuum Angle Valves, Normally Closed, O-Ring Seal, XLF Series

  SMC

  [Features]
  · Aluminum body
  · Uniform baking temperature
  · Lightweight and compact
  · Low outgassing
  · Little heavy metal contamination
  · Resistant to fluorine corrosion
  · Replaceable bellows (bellows-seal type)

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• 

  Aluminum High Vacuum Angle Valve, Manual Type, Bellows Seal, XLH Series

  SMC

  A high vacuum angle valve with a pressure-balanced structure that enables an unrestricted exhaust direction.
  [Features]
  · Bellows type is particulate-free and cleaned.
  · Low actuation torque (0.5 N·m or less).
  · Spring provides a standard sealing load.
  · Handle height remains the same regardless of whether valve is open or closed.
  · Equipped as standard with an indicator for confirming if the valve is open or closed.
  · Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
  · Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
  · Low sputtering yield minimizes heavy metal contamination of wafers.

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• 

  Stainless Steel High-Vacuum Angle Valves / In-Line Valves, Normally Closed, Bellows Seal, XMA/XYA Series

  SMC

  A vacuum valve with a pressure balanced structure.
  [Features]
  · Body material: SCS13 (SUS304 equivalent). Made of stainless steel.
  · Precision-cast single-piece structure which helps prevent gas accumulation.
  · Interchangeable with XL Series aluminum high-vacuum angle valves.
  · Bellows type is particulate-free and cleaned.

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• 

  Aluminum High Vacuum Angle Valves, Double Acting, O-Ring Seal, XLG Series

  SMC

  [Features]
  · Aluminum body
  · Uniform baking temperature
  · Lightweight and compact
  · Low outgassing
  · Little heavy metal contamination
  · Resistant to fluorine corrosion
  · Replaceable bellows (bellows-seal type)

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• 

  Stainless Steel High Vacuum Angle Valves / In-Line Valve, 2-Stage Control, Single Acting / Bellows Seal, O-Ring Seal, XMD/XYD Series

  SMC

  A vacuum valve for preventing pumps from running when overloaded.
  [Features]
  · Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve)
  · Allows for compact system designs and reduced piping.
  · Prevents dust turbulence inside the chamber when exhausting.
  · Adjustable flow rate for initial exhaust valve.
  · Body material: SCS13 (SUS304 equivalent).
  · Precision-cast single-piece structure which helps prevent gas accumulation.
  · The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.

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• 

  Aluminum High Vacuum Angle Valve, Double Acting / Bellows Seal, XLC Series

  SMC

  [Features]
  · Aluminum body
  · Uniform baking temperature
  · Lightweight and compact
  · Low outgassing
  · Little heavy metal contamination
  · Resistant to fluorine corrosion
  · Replaceable bellows (bellows-seal type)

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• 

  Aluminum High Vacuum Angle Valve, 2-Step Control, Single Acting / Bellows Seal, O-Ring Seal, XLD Series

  SMC

  A high vacuum angle valve with initial exhaust valve with adjustable flow rate.
  [Features]
  · Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve).
  · Allows for compact system designs and reduced piping.
  · Prevents dust turbulence inside the chamber when exhausting.
  · Prevents pumps from running when overloaded.
  · Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
  · Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
  · Low sputtering yield minimizes heavy metal contamination of wafers.

  • Volume Discount

  CAD ：

  2D / 3D

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• 

  Stainless Steel High Vacuum Angle Valves / In-Line Valves, XMH/XYH Series (Manual/Bellows Seal)

  SMC

  A vacuum valve with a pressure-balanced structure that enables an unrestricted exhaust direction.
  [Features]
  · Bellows type is particulate-free and cleaned.
  · Low actuation torque (0.5 N·m or less).
  · Spring provides a standard sealing load.
  · Handle height remains the same regardless of whether valve is open or closed.
  · Equipped as standard with an indicator for confirming if the valve is open or closed.
  · Body material: SCS13 (SUS304 equivalent).
  · Precision-cast single-piece structure which helps prevent gas accumulation.
  · The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.

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• 

  Smooth Vent Valve (Supply Line) XVD2-02S, XVD2-02V

  SMC

  A smooth vent valve with an adjustable flow rate for both the initial and main air supplies.
  [Features]
  · An integrated valve and needle valve structure that requires on 1/4 the piping space of previous models.
  · Uses a metal diaphragm for the seat section, greatly reducing the generation of particulate matter.
  · Valve type: Normally closed (pressurize to open, spring seal).
  Fluids: Nitrogen, air, inert gas.
  · Operating temperature: 5 to 60°C (baking temperature, 150°C or less).
  · Weight: 0.5 kg.

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