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#CODE
- Discontinued Products
Aluminum High Vacuum Angle Valve XLS Series (Electromagnetic Type, Bellows Pressure Balance)
- Volume Discount
A high vacuum angle valve that requires no air to drive, enabling use in portable equipment.
[Features]
· Uses no sliding metal parts, minimizing particulate matter.
· The pressure balance mechanism allows an unrestricted exhaust direction.
· A control power supply circuit for solenoid valve drive is now standard.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.
(i)Caution
- Refer to the manufacturer's catalog for specification and material details.
- CAD data is not available for some model numbers.
- Product images may be representative. Please refer to the manufacturer's catalog for shape details.
Part Number
Configured Part Number is shown.
| Part Number |
|---|
| XLS-16-5D |
| XLS-16-5G |
| XLS-16-P2G |
| XLS-16-P5G |
| XLS-25-5G |
| XLS-25-P1G |
| XLS-25-P2G |
| XLS-25-P5G |
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Basic Information
| Type | Solenoid Valve | Application | Single Item Operating | Installation method | Direct |
|---|---|---|---|---|---|
| Number of Ports | 2-Port Valve | Types of solenoid | Single | Types of switching | 2-Position Normally Closed |
| Electromagnetic valve drive type | Directly Operated | Type of Piping Opening | Flange | Flange Type | KF |
| Seal Type | Bellows Seal | CE-marked | None |
- The specifications and dimensions of some parts may not be fully covered. For exact details, refer to manufacturer catalogs .
Additional Products in this Category
- Vacuum Assist Valve ZP2V Series
- Stainless Steel High-Vacuum Angle Valves / In-Line Valves, Normally Closed, Bellows Seal, XMA/XYA Series
- Aluminum High Vacuum Angle Valve, Manual Type, Bellows Seal, XLH Series
- Stainless Steel High Vacuum Angle Valves / In-Line Valves, Double Acting / Bellows Seal, XMC/XYC Series
- Stainless Steel High Vacuum Angle Valves / In-Line Valve, 2-Stage Control, Single Acting / Bellows Seal, O-Ring Seal, XMD/XYD Series
- Stainless Steel High Vacuum Angle Valves / In-Line Valves, XMH/XYH Series (Manual/Bellows Seal)
- Normally Closed Type High Vacuum Solenoid Valve XSA Series (XSA1/XSA2/XSA3)
- Smooth Vent Valve (Supply Line) XVD2-02S, XVD2-02V
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