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[Features]
· Aluminum body
· Uniform baking temperature
· Lightweight and compact
· Low outgassing
· Little heavy metal contamination
· Resistant to fluorine corrosion
· Replaceable bellows (bellows-seal type)
Part Number
Configured Part Number is shown.
XLF-16G-2M9//
Type | Pilot Vacuum Valve | Application | Single Item Operating | Installation method | Direct |
---|---|---|---|---|---|
Number of Ports | 2-Port Valve | Types of switching | 2-Position Normally Closed | Type of Piping Opening | Flange |
Flange Type | KF | Seal Type | Elastic Seal | Temperature Range(°C) | 5 to 60 |
Number of Switches | No switch | Seal material | FKM 1349-80 | Amount of leakage(Pa·m3/s) | Internal: 1.3 × -10, External: 1.3 × -10 |
Body Surface Treatment | External: hard anodized aluminum, Internal: base material | Seal Change Location | None | Heater Yes/No | None |
Please check the type/dimensions/specifications of the part XLF-16G-2M9// in the Aluminum High Vacuum Angle Valves, Normally Closed, O-Ring Seal, XLF Series series.
Part Number |
---|
XLF-16-2 |
XLF-16-2M9// |
XLF-25-2 |
XLF-25-2M9// |
XLF-40-2 |
XLF-40-2M9// |
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