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A vacuum valve with a pressure balanced structure.
[Features]
· Body material: SCS13 (SUS304 equivalent). Made of stainless steel.
· Precision-cast single-piece structure which helps prevent gas accumulation.
· Interchangeable with XL Series aluminum high-vacuum angle valves.
· Bellows type is particulate-free and cleaned.
Part Number
Configured Part Number is shown.
Part Number |
---|
XMA-16 |
XMA-16A-M9PLA |
XMA-25 |
XMA-25AH0 |
XMA-25F-M9// |
XMA-25F-M9NA |
XMA-25H0 |
XMA-63KH0 |
XYA-25A-M9// |
XYA-40-M9NA |
XYA-50 |
XYA-80 |
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Number of Ports | 2-Port Valve | Type of Piping Opening | Flange | Type | Air-Actuated Vacuum Valve |
---|---|---|---|---|---|
Application | Single Item Operating | Types of switching | 2-Position Normally Closed | Installation method | Direct |
Flange Type | NW | Seal Type | Bellows Seal | Seal material | FKM (1349-80) |
Amount of leakage(Pa·m3/s) | 1.3 × 10-10 (FKM) / 1.3 × 10-11 (FKM) (internal/external) |
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