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A high vacuum angle valve that requires no air to drive, enabling use in portable equipment.
[Features]
· Uses no sliding metal parts, minimizing particulate matter.
· The pressure balance mechanism allows an unrestricted exhaust direction.
· A control power supply circuit for solenoid valve drive is now standard.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.
Part Number
Configured Part Number is shown.
XLS-16-P2G
Type | Solenoid Valve | Application | Single Item Operating | Installation method | Direct |
---|---|---|---|---|---|
Number of Ports | 2-Port Valve | Types of solenoid | Single | Types of switching | 2-Position Normally Closed |
Electromagnetic valve drive type | Directly Operated | Type of Piping Opening | Flange | Flange Type | KF |
Seal Type | Bellows Seal | CE-marked | None |
Please check the type/dimensions/specifications of the part XLS-16-P2G in the Aluminum High Vacuum Angle Valve XLS Series (Electromagnetic Type, Bellows Pressure Balance) series.
Part Number |
---|
XLS-16-5D |
XLS-16-5G |
XLS-16-P5G |
XLS-25-5G |
XLS-25-P1G |
XLS-25-P2G |
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