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Aluminum High Vacuum Angle Valve XLS Series (Electromagnetic Type, Bellows Pressure Balance)

Aluminum High Vacuum Angle Valve XLS Series (Electromagnetic Type, Bellows Pressure Balance)
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A high vacuum angle valve that requires no air to drive, enabling use in portable equipment.
[Features]
· Uses no sliding metal parts, minimizing particulate matter.
· The pressure balance mechanism allows an unrestricted exhaust direction.
· A control power supply circuit for solenoid valve drive is now standard.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.

(i)Caution

  • Refer to the manufacturer's catalog for specification and material details.
  • CAD data is not available for some model numbers.
  • Product images may be representative. Please refer to the manufacturer's catalog for shape details.

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Part Number

Configured Part Number is shown.

Part Number
XLS-16-5G
XLS-16-P2G
XLS-16-P5G
XLS-25-5G
XLS-25-P1G
XLS-25-P2G
XLS-25-P5G
Part NumberMinimum order quantityVolume DiscountDays to Ship Flange Calls Voltage Sonic Conductance Electrical Entry Method Control Power Supply Yes/No
1 Piece(s)Available

Quote

1624 VDC5L/SGrommetNone
1 Piece(s)Available

Quote

16200 VAC5L/SGrommetWith control power supply
1 Piece(s)Available

Quote

1624 VDC5L/SGrommetWith control power supply
1 Piece(s)Available

Quote

2524 VDC8L/SGrommetNone
1 Piece(s)Available

Quote

25100 VAC8L/SGrommetWith control power supply
1 Piece(s)Available

Quote

25200 VAC8L/SGrommetWith control power supply
1 Piece(s)Available

Quote

2524 VDC8L/SGrommetWith control power supply

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Basic Information

Type Solenoid Valve Application Single Item Operating Installation method Direct
Number of Ports 2-Port Valve Types of solenoid Single Types of switching 2-Position Normally Closed
Electromagnetic valve drive type Directly Operated Type of Piping Opening Flange Flange Type KF
Seal Type Bellows Seal CE-marked None

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