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#CODE
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Aluminum High Vacuum Angle Valve, 2-Step Control, Single Acting / Bellows Seal, O-Ring Seal, XLD Series
- Volume Discount
A high vacuum angle valve with initial exhaust valve with adjustable flow rate.
[Features]
· Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve).
· Allows for compact system designs and reduced piping.
· Prevents dust turbulence inside the chamber when exhausting.
· Prevents pumps from running when overloaded.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.
(i)Caution
- Refer to the manufacturer's catalog for specification and material details.
- CAD data is not available for some model numbers.
- Product images may be representative. Please refer to the manufacturer's catalog for shape details.
Part Number
Configured Part Number is shown.
| Part Number |
|---|
| XLD-25 |
| XLD-40 |
| XLD-50-M9BA |
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Basic Information
| Type | Air-Actuated Vacuum Valve | Application | Single Item Operating | Installation method | Direct |
|---|---|---|---|---|---|
| Number of Ports | 2-Port Valve | Types of switching | 2-Position Normally Closed | Type of Piping Opening | Flange |
| Flange Type | KF | Seal Type | Bellows Seal | Pilot Port Direction | Flange side |
| Temperature Range(°C) | 5 to 60 | Seal material | FKM 1349-80 | Amount of leakage(Pa·m3/s) | Internal: 1.3 × 10-10, External: 1.3 × 10-11 |
| Body Surface Treatment | External: hard anodized aluminum, Internal: base material | Seal Change Location | None | Heater Yes/No | None |
Specification/Dimensions
-
Flange Calls
- 25
- 40
- 50
-
Sonic Conductance
-
Switch Part Number
-
Number of Switches
- 2 pcs. valve open/closed
- No switch
-
Length of Lead Wire for Switch(m)
- 0.5
-
type
- XLD
-
CAD
- 2D
- 3D
Specify Alterations
- The specifications and dimensions of some parts may not be fully covered. For exact details, refer to manufacturer catalogs .
Additional Products in this Category
- Vacuum Assist Valve ZP2V Series
- Aluminum High Vacuum Angle Valves, Normally Closed, O-Ring Seal, XLF Series
- Aluminum High Vacuum Angle Valve, Manual Type, Bellows Seal, XLH Series
- Aluminum High Vacuum Angle Valve XLS Series (Electromagnetic Type, Bellows Pressure Balance)
- Stainless Steel High Vacuum Angle Valves / In-Line Valves, Double Acting / Bellows Seal, XMC/XYC Series
- Stainless Steel High Vacuum Angle Valves / In-Line Valve, 2-Stage Control, Single Acting / Bellows Seal, O-Ring Seal, XMD/XYD Series
- Stainless Steel High Vacuum Angle Valves / In-Line Valves, XMH/XYH Series (Manual/Bellows Seal)
- Smooth Vent Valve (Supply Line) XVD2-02S, XVD2-02V
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