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[Features]
· Aluminum body
· Uniform baking temperature
· Lightweight and compact
· Low outgassing
· Little heavy metal contamination
· Resistant to fluorine corrosion
· Replaceable bellows (bellows-seal type)
Part Number
Configured Part Number is shown.
XLC-25-2M9PZA-XA
Type | Pilot Vacuum Valve | Application | Single Item Operating | Installation method | Direct |
---|---|---|---|---|---|
Number of Ports | 2-Port Valve | Types of switching | 2-Position Normally Closed | Type of Piping Opening | Flange |
Flange Type | KF | Flange Calls | 25 | Seal Type | Bellows Seal |
Sonic Conductance | 14L/S | Pilot Port Direction | Flange side | Temperature Range(°C) | 5 to 60 |
Switch Part Number | D-M9P (Z) solid-state auto switch | Number of Switches | 2 pcs. valve open/closed | Seal material | FKM 1349-80 |
Amount of leakage(Pa·m3/s) | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | Body Surface Treatment | External: hard anodized aluminum, internal: anodic oxidation | Seal Change Location | None |
Length of Lead Wire for Switch(m) | 5 | Heater Yes/No | None |
Please check the type/dimensions/specifications of the part XLC-25-2M9PZA-XA in the Aluminum High Vacuum Angle Valve, Double Acting / Bellows Seal, XLC Series series.
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