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Vacuum regulator with low outgassing.
[Features]
· Aluminum body.
· Replaceable bellows.
· Uniform baking temperature.
· Lightweight and compact.
· Little heavy metal contamination.
Part Number
Configured Part Number is shown.
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Type | Air-Actuated Vacuum Valve | Application | Single Item Operating | Installation method | Direct |
---|---|---|---|---|---|
Number of Ports | 3-Port Valve | Types of solenoid | Single | Types of switching | 2-Position Normally Closed |
Type of Piping Opening | Flange | Seal Type | Bellows Seal | Temperature Range(°C) | 5 to 60℃ (no heater) |
Seal material | FKM (Formula No.: 1349-80) | Body Surface Treatment | External: hard anodized aluminum, Internal: base material | Seal Change Location | None |
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