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[Features]
· The KD series is a direct diaphragm valve with a compact design that provides high CV value. It is suitable for high purity gas for semiconductors, demonstrating high durability, corrosion resistance, and reliability.
· Superior gas replacement performance is achieved by minimizing the dimensions of the vertical hole in the body and achieving an internal volume of 1.2 cm3 (when 1/4" CVC male is open).
· The unique gas seal structure was implemented for better seal performance, high durability, outgassing performance, and corrosion resistance.
· The unique formation method and the high corrosion resistance of the carefully selected diaphragm material means there is little individual difference between pieces, and this gives high durability.
· The high-level production environment and inner surface polishing process delivers quality particle performance which supports high purity gas for the semiconductor industry.
Part Number
Configured Part Number is shown.
KD6MS-SC-STD-316L
Part Number |
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KD6MS-SC-STD-316L |
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Main Body Shape | Straight | Body Material | 316L Stainless Steel | Applicable Fluids | Air / Gas |
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Handle Shape | Round-shaped handle | Main Body Lining | No | Operating Temperature Range(℃) | -10::80 |
Operating Pressure Range(MPa) | 0.4::0.7 | Handle diameter D(φ) | 42 | Operation Mode | Manual |
Operation Method | 270 degrees manual |
Please check the type/dimensions/specifications of the part KD6MS-SC-STD-316L in the High Purity Gas Valve KD, Diaphragm Valve Straight Type, Manual series.
Part Number |
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KD4MS-VFC-EP-316L |
KD8MS-VC-STD-316L |
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