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[Features]
・Suitable for long workpieces such as substrates and semiconductors.
・A wide range of pad sizes, pad materials, and holder shapes are available.
・The existing vacuum pad holders (A and B types) have been downsized to save space.
・The pad part can be replaced without removing the holder from the equipment as before.
・The optional drop prevention valve and pad direct-attachment type filter are also available.
・Pad holders for fields requiring [no use of copper-based metals] and [low-concentration ozone countermeasures] have been added.
・The metal part is made of copper-free metal and HNBR is used for the seal rubber material.
Part Number
Configured Part Number is shown.
VPC4X10ES6J
Pad Type | Oval | Pad type | Standard / Holder Set | Mounting Method | Pad Screw Fixed |
---|---|---|---|---|---|
Material | Rubber-based | Rubber Group Material | Silicone Rubber | Environment | Standard |
Color | White | Width X | 4 | Length Y | 10 |
Height L1(mm) | 7 | Mounting Fitting | Spring Type | Springs Power(N) | 7.0~12.6 |
Stroke(mm) | 6 | Full length B(mm) | 63.1 | Vacuum Outlet Direction | Top |
Mount Connection Screw | M14 | Outer Diameter of Vacuum Outlet Tube(φ) | 6 | Fall Prevention Valve | None |
Direct Attached Filter | None |
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