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A highly accurate, high rigidity linear ball guide type stage (XYZ-axis).[Features]・ Achieved high stiffness and high accuracy by adopting stainless steel as the body material and gothic arch grooves in the guide part
・ XY-axis have an integrated XY structure, reducing height
[Applications]・ Adjustment of cameras, microscopes, sensors and optical components
・ Positioning of production, assembly and inspection processes related to semiconductors and measuring instruments.
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Stage (Z) Surface Orientation | Vertical | Load Capacity (Range)(N) | 30.1~50 | Feeding Method | Micrometer Head |
---|---|---|---|---|---|
Guiding Mechanism | Linear Ball | Table Material | Stainless Steel | Table Surface Treatment | Electroless Nickel Plating |
Allowable Load(N) | 49 | Through Hole (Table Center Hole) | No | Table Straightness(µm) | 3 |
Clamp | Standard | Feed method (micrometer type) | Standard | Feed pitch(mm) | 0.5mm |
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