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- Webcode Seach | Series
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#CODE
- Discontinued Products
Vacuum Valves（Type：Air-Actuated Vacuum Valve）
| Days to Ship |
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Vacuum Assist Valve ZP2V Series
SMC
A vacuum valve which inhibits drops in vacuum pressure, even when no workpiece is present.
[Features]
· Keeps hold of workpieces when multiple vacuum pads are used by a single vacuum generator.
· Protects against drops in vacuum pressure, even when some pads are not suctioning.
· Single-action fitting models now also available.
· No need for switching the operation when changing out workpieces.
· Allows the simplification of control circuits when workpieces have different shapes.
· Fixed orifice size: 0.3 mm, 0.5 mm, 0.7 mm, 1 mm.- Volume Discount
Days to Ship: Same day or more Show Stock Products
-
Aluminum High Vacuum Angle Valves, Normally Closed, Bellows Seal, XLA Series
SMC
Vacuum regulator with low outgassing.
[Features]
· Aluminum body.
· Replaceable bellows.
· Uniform baking temperature.
· Lightweight and compact.
· Little heavy metal contamination.- Volume Discount
Days to Ship: Quote -
SMC
A high vacuum angle valve with initial exhaust valve with adjustable flow rate.
[Features]
· Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve).
· Allows for compact system designs and reduced piping.
· Prevents dust turbulence inside the chamber when exhausting.
· Prevents pumps from running when overloaded.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.- Volume Discount
Days to Ship: Quote -
SMC
A vacuum valve with a pressure balanced structure.
[Features]
· Body material: SCS13 (SUS304 equivalent). Made of stainless steel.
· Precision-cast single-piece structure which helps prevent gas accumulation.
· Interchangeable with XL Series aluminum high-vacuum angle valves.
· Bellows type is particulate-free and cleaned.- Volume Discount
Days to Ship: Quote
| Brand |
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| Product Series |
| CAD |
| Days to Ship |
| Type |
| Application |
| Installation method |
| Number of Ports |
| Types of solenoid |
| Types of switching |
| Electromagnetic valve drive type |
| Effective Sectional Area(mm2) |
| Type of Piping Opening |
| Nominal Designation of Piping Thread |
| Connection tube diameter |
| Flange Type |
| Flange Calls |
| Cv Value |
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| |
| Brand | SMC | SMC | SMC | SMC |
| Product Series | Aluminum High Vacuum Angle Valves, Normally Closed, Bellows Seal, XLA Series | |||
| CAD |
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| Days to Ship |
Same day or more
Show Stock Products | Quote | Quote | Quote |
| Type | Air-Actuated Vacuum Valve | Air-Actuated Vacuum Valve | Air-Actuated Vacuum Valve | Air-Actuated Vacuum Valve |
| Application | Single Item Operating | Single Item Operating | Single Item Operating | Single Item Operating |
| Installation method | Direct | Direct | Direct | Direct |
| Number of Ports | 2-Port Valve | 3-Port Valve | 2-Port Valve | 2-Port Valve |
| Types of solenoid | - | Single | - | - |
| Types of switching | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed |
| Electromagnetic valve drive type | - | - | - | - |
| Effective Sectional Area(mm2) | 0.07 ～ 0.78 | - | - | - |
| Type of Piping Opening | M / RC / NPT / One-Touch Pipe | Flange | Flange | Flange |
| Nominal Designation of Piping Thread | M5 / 1/8 / M6 / M8 | - | - | - |
| Connection tube diameter | ø4 / ø6 | - | - | - |
| Flange Type | - | NW / Other | KF | NW |
| Flange Calls | - | 16 / 25 / 40 / 50 / 63 | 25 / 40 / 50 | 16 / 25 / 40 / 50 / 63 / 80 |
| Cv Value | 0.0037940379 ～ 0.0422764228 | - | - | - |
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Specification/Dimensions
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Type
- Solenoid Valve
- Electromagnetic valve used under high vacuum
- Manual Vacuum Valve
- Pilot Vacuum Valve
- Air-Actuated Vacuum Valve
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Application
- Single Item Operating
-
Installation method
- Direct
-
Number of Ports
-
Types of solenoid
- Single
-
Types of switching
-
Electromagnetic valve drive type
-
Metric / Inch
- metric
-
Effective Sectional Area(mm2)
-
Type of Piping Opening
- M
- RC
- NPT
- One-Touch Pipe
- Flange
- Bite type Fittings
- Compression Fitting
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Nominal Designation of Piping Thread
- M5
- 1/8
- 1/4
- 3/8
- M6
- M8
-
Connection tube diameter
- ø4
- ø6
-
Flange Type
- KF
- NW
- Other
-
Flange Calls
- 16
- 25
- 40
- 50
- 63
- 80
-
Cv Value
CAD
-
- 2D
- 3D
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