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Aluminum High Vacuum Angle Valves, Normally Closed, O-Ring Seal, XLF Series
SMC
[Features]
· Aluminum body
· Uniform baking temperature
· Lightweight and compact
· Low outgassing
· Little heavy metal contamination
· Resistant to fluorine corrosion
· Replaceable bellows (bellows-seal type)
Days to Ship: | Quote |
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SMC
Vacuum valve with precision-cast single-piece structure which helps prevent gas accumulation.
[Features]
· Bellows type is particulate-free and cleaned.
· Pressure balanced structure.
· Body material: SCS13 (SUS304 equivalent).
· The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.
Days to Ship: | Quote |
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Aluminum High Vacuum Angle Valves, Double Acting, O-Ring Seal, XLG Series
SMC
[Features]
· Aluminum body
· Uniform baking temperature
· Lightweight and compact
· Low outgassing
· Little heavy metal contamination
· Resistant to fluorine corrosion
· Replaceable bellows (bellows-seal type)
Days to Ship: | 3 Days or more |
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SMC
A vacuum valve for preventing pumps from running when overloaded.
[Features]
· Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve)
· Allows for compact system designs and reduced piping.
· Prevents dust turbulence inside the chamber when exhausting.
· Adjustable flow rate for initial exhaust valve.
· Body material: SCS13 (SUS304 equivalent).
· Precision-cast single-piece structure which helps prevent gas accumulation.
· The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.
Days to Ship: | Quote |
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Aluminum High Vacuum Angle Valve, Double Acting / Bellows Seal, XLC Series
SMC
[Features]
· Aluminum body
· Uniform baking temperature
· Lightweight and compact
· Low outgassing
· Little heavy metal contamination
· Resistant to fluorine corrosion
· Replaceable bellows (bellows-seal type)
Days to Ship: | Quote |
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Product Series |
CAD |
Days to Ship |
Type |
Application |
Installation method |
Number of Ports |
Types of solenoid |
Types of switching |
Electromagnetic valve drive type |
Effective Sectional Area(mm2) |
Type of Piping Opening |
Nominal Designation of Piping Thread |
Connection tube diameter |
Flange Type |
Flange Calls |
Cv Value |
Brand | SMC | SMC | SMC | SMC | SMC |
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Product Series | Aluminum High Vacuum Angle Valves, Normally Closed, O-Ring Seal, XLF Series | Aluminum High Vacuum Angle Valves, Double Acting, O-Ring Seal, XLG Series | Aluminum High Vacuum Angle Valve, Double Acting / Bellows Seal, XLC Series | ||
CAD |
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Days to Ship | Quote | Quote | 3 Days or more | Quote | Quote |
Type | Pilot Vacuum Valve | Pilot Vacuum Valve | Pilot Vacuum Valve | Pilot Vacuum Valve | Pilot Vacuum Valve |
Application | Single Item Operating | Single Item Operating | Single Item Operating | Single Item Operating | Single Item Operating |
Installation method | Direct | Direct | Direct | Direct | Direct |
Number of Ports | 2-Port Valve | 2-Port Valve | 2-Port Valve | 2-Port Valve | 2-Port Valve |
Types of solenoid | - | - | - | - | - |
Types of switching | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed |
Electromagnetic valve drive type | - | - | - | - | - |
Effective Sectional Area(mm2) | - | - | - | - | - |
Type of Piping Opening | Flange | Flange | Flange | Flange | Flange |
Nominal Designation of Piping Thread | - | - | - | - | - |
Connection tube diameter | - | - | - | - | - |
Flange Type | KF | KF | KF | KF | KF |
Flange Calls | 16 / 25 / 40 | 25 / 40 / 50 | 25 | 25 | 25 |
Cv Value | - | - | - | - | - |
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