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Vacuum Valves（Type：Manual Vacuum Valve）
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Aluminum High Vacuum Angle Valve, Manual Type, Bellows Seal, XLH Series
SMC
A high vacuum angle valve with a pressure-balanced structure that enables an unrestricted exhaust direction.
[Features]
· Bellows type is particulate-free and cleaned.
· Low actuation torque (0.5 N·m or less).
· Spring provides a standard sealing load.
· Handle height remains the same regardless of whether valve is open or closed.
· Equipped as standard with an indicator for confirming if the valve is open or closed.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.- Volume Discount
Days to Ship: Quote -
Stainless Steel High Vacuum Angle Valves / In-Line Valves, XMH/XYH Series (Manual/Bellows Seal)
SMC
A vacuum valve with a pressure-balanced structure that enables an unrestricted exhaust direction.
[Features]
· Bellows type is particulate-free and cleaned.
· Low actuation torque (0.5 N·m or less).
· Spring provides a standard sealing load.
· Handle height remains the same regardless of whether valve is open or closed.
· Equipped as standard with an indicator for confirming if the valve is open or closed.
· Body material: SCS13 (SUS304 equivalent).
· Precision-cast single-piece structure which helps prevent gas accumulation.
· The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.- Volume Discount
Days to Ship: Quote -
Smooth Vent Valve (Supply Line) XVD2-02S, XVD2-02V
SMC
A smooth vent valve with an adjustable flow rate for both the initial and main air supplies.
[Features]
· An integrated valve and needle valve structure that requires on 1/4 the piping space of previous models.
· Uses a metal diaphragm for the seat section, greatly reducing the generation of particulate matter.
· Valve type: Normally closed (pressurize to open, spring seal).
Fluids: Nitrogen, air, inert gas.
· Operating temperature: 5 to 60°C (baking temperature, 150°C or less).
· Weight: 0.5 kg.- Volume Discount
Days to Ship: Quote -
Stainless Steel Valve, For Vacuums, NW Flange Ball Valve
Consuss
If the need is for the MISUMI lowest cost vacuum valve, use CONSUSS.
This offers a vacuum valve with high quality and low cost.- Volume Discount
Days to Ship: 8 Days or more
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| Product Series |
| CAD |
| Days to Ship |
| Type |
| Application |
| Installation method |
| Number of Ports |
| Types of solenoid |
| Types of switching |
| Electromagnetic valve drive type |
| Effective Sectional Area(mm2) |
| Type of Piping Opening |
| Nominal Designation of Piping Thread |
| Connection tube diameter |
| Flange Type |
| Flange Calls |
| Cv Value |
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| Brand | SMC | SMC | SMC | Consuss |
| Product Series | Aluminum High Vacuum Angle Valve, Manual Type, Bellows Seal, XLH Series | Stainless Steel High Vacuum Angle Valves / In-Line Valves, XMH/XYH Series (Manual/Bellows Seal) | ||
| CAD |
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| Days to Ship | Quote | Quote | Quote | 8 Days or more |
| Type | Manual Vacuum Valve | Manual Vacuum Valve | Manual Vacuum Valve | Manual Vacuum Valve |
| Application | Single Item Operating | Single Item Operating | Single Item Operating | Single Item Operating |
| Installation method | Direct | Direct | Direct | Direct |
| Number of Ports | 2-Port Valve | 2-Port Valve | 2-Port Valve | - |
| Types of solenoid | - | - | - | - |
| Types of switching | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | - |
| Electromagnetic valve drive type | - | - | - | - |
| Effective Sectional Area(mm2) | - | - | 4.6 | - |
| Type of Piping Opening | Flange | Flange | Bite type Fittings | Flange |
| Nominal Designation of Piping Thread | - | - | 1/4 | - |
| Connection tube diameter | - | - | - | - |
| Flange Type | KF | KF | - | NW |
| Flange Calls | 16 / 25 / 40 / 50 | 25 | - | 25 |
| Cv Value | - | - | 84.87 | - |
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Configure
Specification/Dimensions
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Type
- Solenoid Valve
- Electromagnetic valve used under high vacuum
- Manual Vacuum Valve
- Pilot Vacuum Valve
- Air-Actuated Vacuum Valve
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Application
- Single Item Operating
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Installation method
- Direct
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Number of Ports
-
Types of solenoid
- Single
-
Types of switching
-
Electromagnetic valve drive type
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Metric / Inch
- metric
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Effective Sectional Area(mm2)
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Type of Piping Opening
- M
- RC
- NPT
- One-Touch Pipe
- Flange
- Bite type Fittings
- Compression Fitting
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Nominal Designation of Piping Thread
- M5
- 1/8
- 1/4
- 3/8
- M6
- M8
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Connection tube diameter
- ø4
- ø6
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Flange Type
- KF
- NW
- Other
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Flange Calls
- 16
- 25
- 40
- 50
- 63
- 80
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Cv Value
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