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Vacuum Valves（Electromagnetic valve drive type：Directly Operated）
| Days to Ship |
|
|---|
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Normally Closed Type High Vacuum Solenoid Valve XSA Series (XSA1/XSA2/XSA3)
SMC
A normally closed type high vacuum solenoid valve with reduced particulate matter and improved sealing performance.
[Features]
· Flame-retardant (UL94V-0 compliant).
· Two types of fittings (face seal fitting and compression fitting) and female threads (Rc, NPT) are available.
· Moving the spring from the sliding part of the armature iron core to the body reduces the generation of particulate matter caused by contact with the spring.
· Improved sealing performance, securely sealing with its powerful spring.
· Power consumption: 4.5 W (size 1) / 7 W (size 2) / 10.5 W (size 3).
*For DC specification / class B.- Volume Discount
Days to Ship: Quote -
Aluminum High Vacuum Angle Valve XLS Series (Electromagnetic Type, Bellows Pressure Balance)
SMC
A high vacuum angle valve that requires no air to drive, enabling use in portable equipment.
[Features]
· Uses no sliding metal parts, minimizing particulate matter.
· The pressure balance mechanism allows an unrestricted exhaust direction.
· A control power supply circuit for solenoid valve drive is now standard.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.- Volume Discount
Days to Ship: Quote
| Brand |
|---|
| Product Series |
| CAD |
| Days to Ship |
| Type |
| Application |
| Installation method |
| Number of Ports |
| Types of solenoid |
| Types of switching |
| Electromagnetic valve drive type |
| Effective Sectional Area(mm2) |
| Type of Piping Opening |
| Nominal Designation of Piping Thread |
| Connection tube diameter |
| Flange Type |
| Flange Calls |
| Cv Value |
|
| |
| Brand | SMC | SMC |
| Product Series | Normally Closed Type High Vacuum Solenoid Valve XSA Series (XSA1/XSA2/XSA3) | Aluminum High Vacuum Angle Valve XLS Series (Electromagnetic Type, Bellows Pressure Balance) |
| CAD |
|
|
| Days to Ship | Quote | Quote |
| Type | Electromagnetic valve used under high vacuum | Solenoid Valve |
| Application | Single Item Operating | Single Item Operating |
| Installation method | Direct | Direct |
| Number of Ports | 2-Port Valve | 2-Port Valve |
| Types of solenoid | Single | Single |
| Types of switching | 2-Position Normally Closed | 2-Position Normally Closed |
| Electromagnetic valve drive type | Directly Operated | Directly Operated |
| Effective Sectional Area(mm2) | - | - |
| Type of Piping Opening | RC / Compression Fitting | Flange |
| Nominal Designation of Piping Thread | 1/4 / 3/8 | - |
| Connection tube diameter | - | - |
| Flange Type | - | KF |
| Flange Calls | - | 16 / 25 |
| Cv Value | - | - |
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Configure
Specification/Dimensions
-
Type
- Solenoid Valve
- Electromagnetic valve used under high vacuum
- Manual Vacuum Valve
- Pilot Vacuum Valve
- Air-Actuated Vacuum Valve
-
Application
- Single Item Operating
-
Installation method
- Direct
-
Number of Ports
-
Types of solenoid
- Single
-
Types of switching
-
Electromagnetic valve drive type
-
Metric / Inch
- metric
-
Effective Sectional Area(mm2)
-
Type of Piping Opening
- M
- RC
- NPT
- One-Touch Pipe
- Flange
- Bite type Fittings
- Compression Fitting
-
Nominal Designation of Piping Thread
- M5
- 1/8
- 1/4
- 3/8
- M6
- M8
-
Connection tube diameter
- ø4
- ø6
-
Flange Type
- KF
- NW
- Other
-
Flange Calls
- 16
- 25
- 40
- 50
- 63
- 80
-
Cv Value
CAD
-
- 2D
- 3D
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