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- Webcode Seach | Series
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#CODE
- Discontinued Products
Vacuum Valves（Flange Type：KF）
| Days to Ship |
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Aluminum High Vacuum Angle Valve XLS Series (Electromagnetic Type, Bellows Pressure Balance)
SMC
A high vacuum angle valve that requires no air to drive, enabling use in portable equipment.
[Features]
· Uses no sliding metal parts, minimizing particulate matter.
· The pressure balance mechanism allows an unrestricted exhaust direction.
· A control power supply circuit for solenoid valve drive is now standard.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.- Volume Discount
Days to Ship: Quote -
Aluminum High Vacuum Angle Valves, Normally Closed, O-Ring Seal, XLF Series
SMC
[Features]
· Aluminum body
· Uniform baking temperature
· Lightweight and compact
· Low outgassing
· Little heavy metal contamination
· Resistant to fluorine corrosion
· Replaceable bellows (bellows-seal type)- Volume Discount
Days to Ship: Quote -
Aluminum High Vacuum Angle Valve, Manual Type, Bellows Seal, XLH Series
SMC
A high vacuum angle valve with a pressure-balanced structure that enables an unrestricted exhaust direction.
[Features]
· Bellows type is particulate-free and cleaned.
· Low actuation torque (0.5 N·m or less).
· Spring provides a standard sealing load.
· Handle height remains the same regardless of whether valve is open or closed.
· Equipped as standard with an indicator for confirming if the valve is open or closed.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.- Volume Discount
Days to Ship: Quote -
SMC
Vacuum valve with precision-cast single-piece structure which helps prevent gas accumulation.
[Features]
· Bellows type is particulate-free and cleaned.
· Pressure balanced structure.
· Body material: SCS13 (SUS304 equivalent).
· The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.- Volume Discount
Days to Ship: Quote -
Aluminum High Vacuum Angle Valves, Double Acting, O-Ring Seal, XLG Series
SMC
[Features]
· Aluminum body
· Uniform baking temperature
· Lightweight and compact
· Low outgassing
· Little heavy metal contamination
· Resistant to fluorine corrosion
· Replaceable bellows (bellows-seal type)- Volume Discount
Days to Ship: 3 Days or more -
SMC
A vacuum valve for preventing pumps from running when overloaded.
[Features]
· Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve)
· Allows for compact system designs and reduced piping.
· Prevents dust turbulence inside the chamber when exhausting.
· Adjustable flow rate for initial exhaust valve.
· Body material: SCS13 (SUS304 equivalent).
· Precision-cast single-piece structure which helps prevent gas accumulation.
· The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.- Volume Discount
Days to Ship: Quote -
Aluminum High Vacuum Angle Valve, Double Acting / Bellows Seal, XLC Series
SMC
[Features]
· Aluminum body
· Uniform baking temperature
· Lightweight and compact
· Low outgassing
· Little heavy metal contamination
· Resistant to fluorine corrosion
· Replaceable bellows (bellows-seal type)- Volume Discount
Days to Ship: Quote -
SMC
A high vacuum angle valve with initial exhaust valve with adjustable flow rate.
[Features]
· Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve).
· Allows for compact system designs and reduced piping.
· Prevents dust turbulence inside the chamber when exhausting.
· Prevents pumps from running when overloaded.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.- Volume Discount
Days to Ship: Quote -
Stainless Steel High Vacuum Angle Valves / In-Line Valves, XMH/XYH Series (Manual/Bellows Seal)
SMC
A vacuum valve with a pressure-balanced structure that enables an unrestricted exhaust direction.
[Features]
· Bellows type is particulate-free and cleaned.
· Low actuation torque (0.5 N·m or less).
· Spring provides a standard sealing load.
· Handle height remains the same regardless of whether valve is open or closed.
· Equipped as standard with an indicator for confirming if the valve is open or closed.
· Body material: SCS13 (SUS304 equivalent).
· Precision-cast single-piece structure which helps prevent gas accumulation.
· The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.- Volume Discount
Days to Ship: Quote
| Brand |
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| Product Series |
| CAD |
| Days to Ship |
| Type |
| Application |
| Installation method |
| Number of Ports |
| Types of solenoid |
| Types of switching |
| Electromagnetic valve drive type |
| Effective Sectional Area(mm2) |
| Type of Piping Opening |
| Nominal Designation of Piping Thread |
| Connection tube diameter |
| Flange Type |
| Flange Calls |
| Cv Value |
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| Brand | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC |
| Product Series | Aluminum High Vacuum Angle Valve XLS Series (Electromagnetic Type, Bellows Pressure Balance) | Aluminum High Vacuum Angle Valves, Normally Closed, O-Ring Seal, XLF Series | Aluminum High Vacuum Angle Valve, Manual Type, Bellows Seal, XLH Series | Aluminum High Vacuum Angle Valves, Double Acting, O-Ring Seal, XLG Series | Aluminum High Vacuum Angle Valve, Double Acting / Bellows Seal, XLC Series | Stainless Steel High Vacuum Angle Valves / In-Line Valves, XMH/XYH Series (Manual/Bellows Seal) | |||
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| Days to Ship | Quote | Quote | Quote | Quote | 3 Days or more | Quote | Quote | Quote | Quote |
| Type | Solenoid Valve | Pilot Vacuum Valve | Manual Vacuum Valve | Pilot Vacuum Valve | Pilot Vacuum Valve | Pilot Vacuum Valve | Pilot Vacuum Valve | Air-Actuated Vacuum Valve | Manual Vacuum Valve |
| Application | Single Item Operating | Single Item Operating | Single Item Operating | Single Item Operating | Single Item Operating | Single Item Operating | Single Item Operating | Single Item Operating | Single Item Operating |
| Installation method | Direct | Direct | Direct | Direct | Direct | Direct | Direct | Direct | Direct |
| Number of Ports | 2-Port Valve | 2-Port Valve | 2-Port Valve | 2-Port Valve | 2-Port Valve | 2-Port Valve | 2-Port Valve | 2-Port Valve | 2-Port Valve |
| Types of solenoid | Single | - | - | - | - | - | - | - | - |
| Types of switching | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed |
| Electromagnetic valve drive type | Directly Operated | - | - | - | - | - | - | - | - |
| Effective Sectional Area(mm2) | - | - | - | - | - | - | - | - | - |
| Type of Piping Opening | Flange | Flange | Flange | Flange | Flange | Flange | Flange | Flange | Flange |
| Nominal Designation of Piping Thread | - | - | - | - | - | - | - | - | - |
| Connection tube diameter | - | - | - | - | - | - | - | - | - |
| Flange Type | KF | KF | KF | KF | KF | KF | KF | KF | KF |
| Flange Calls | 16 / 25 | 16 / 25 / 40 | 16 / 25 / 40 / 50 | 25 / 40 / 50 | 25 | 25 | 25 | 25 / 40 / 50 | 25 |
| Cv Value | - | - | - | - | - | - | - | - | - |
Loading...
Configure
Specification/Dimensions
-
Type
- Solenoid Valve
- Electromagnetic valve used under high vacuum
- Manual Vacuum Valve
- Pilot Vacuum Valve
- Air-Actuated Vacuum Valve
-
Application
- Single Item Operating
-
Installation method
- Direct
-
Number of Ports
-
Types of solenoid
- Single
-
Types of switching
-
Electromagnetic valve drive type
-
Metric / Inch
- metric
-
Effective Sectional Area(mm2)
-
Type of Piping Opening
- M
- RC
- NPT
- One-Touch Pipe
- Flange
- Bite type Fittings
- Compression Fitting
-
Nominal Designation of Piping Thread
- M5
- 1/8
- 1/4
- 3/8
- M6
- M8
-
Connection tube diameter
- ø4
- ø6
-
Flange Type
- KF
- NW
- Other
-
Flange Calls
- 16
- 25
- 40
- 50
- 63
- 80
-
Cv Value
CAD
-
- 2D
- 3D
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