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Aluminum High Vacuum Angle Valve XLS Series (Electromagnetic Type, Bellows Pressure Balance)
SMC
A high vacuum angle valve that requires no air to drive, enabling use in portable equipment.
[Features]
· Uses no sliding metal parts, minimizing particulate matter.
· The pressure balance mechanism allows an unrestricted exhaust direction.
· A control power supply circuit for solenoid valve drive is now standard.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.
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Brand |
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Product Series |
CAD |
Days to Ship |
Type |
Application |
Installation method |
Number of Ports |
Types of solenoid |
Types of switching |
Electromagnetic valve drive type |
Effective Sectional Area(mm2) |
Type of Piping Opening |
Nominal Designation of Piping Thread |
Connection tube diameter |
Flange Type |
Flange Calls |
Cv Value |
Brand | SMC |
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Product Series | Aluminum High Vacuum Angle Valve XLS Series (Electromagnetic Type, Bellows Pressure Balance) |
CAD |
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Days to Ship | Quote |
Type | Solenoid Valve |
Application | Single Item Operating |
Installation method | Direct |
Number of Ports | 2-Port Valve |
Types of solenoid | Single |
Types of switching | 2-Position Normally Closed |
Electromagnetic valve drive type | Directly Operated |
Effective Sectional Area(mm2) | - |
Type of Piping Opening | Flange |
Nominal Designation of Piping Thread | - |
Connection tube diameter | - |
Flange Type | KF |
Flange Calls | 16 / 25 |
Cv Value | - |
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