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Z-Axis Stage; lightweight and compact with excellent accuracy.
Part Number
Configured Part Number is shown.
Part Number | - | Sensor | - | Motor | - | Cable |
ZMPG730 ZMPG730 |
- - |
L R |
- - |
C MS |
- - |
N N |
Part Number | Sensor | Motor | Cable | Mechanical Standards | Accuracy Standards *1 | |||||
Type | No. | Cover Position | Stage Surface (mm) | Travel Distance (mm) | Weight (kg) | Unidirectional Positioning Accuracy | Pitching | Yawing | ||
ZMPG | 730 | L (Standard) R (Reversed) |
C (Standard) |
N (Cable not included (separately sold)) |
60×70 | 30 | 0.9 | 5µm or less / Full Stroke | 25'' | 20'' |
MS (38 Micro Step) |
1.1 |
CAD Data download and 3D preview are not available because the part number has not yet been determined.
Part Number |
---|
ZMPG730-L-C-N |
ZMPG730-R-C-N |
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Feed Screw | Ball Screw Ø8, Lead 1 | |
Guide | Cross Roller Guide | |
Resolution *2 | Full | 2µm (1µm)*3 |
Half | 1µm(0.5µm)*3 | |
Fine Feed (upon 1/20 partitioned) | 0.05µm | |
Max. Speed *4 | 20mm/sec | |
Positioning repeatability | Within ±0.2µm | |
Load Capacity | 29.4N | |
Lost Motion | 1µm or less | |
Backlash | 0.5µm or less | |
Straightness | 3µm or less | |
Parallelism | 30µm or less | |
Motion Parallelism | 10µm or less |
Part Number | C | MS | |
Standard | 38 Micro Step | ||
Motor | Type | 5-Phase Stepping Motor 0.75A/Phase (Oriental Motor Co., Ltd.) | |
Part Number | PMM33BH2-C16-1(#28mm) | C7214-9015-1(#38mm) | |
Step Angle | 0.72° | 0.36° | |
Driver Part Number | - | ||
Connector | Part Number | HR10A-10J-12P (73) (Hirose Electric Co., LTD.) | |
Applicable Receptacle Connector | HR10A-10P-12S (73) (Hirose Electric Co., LTD.) | ||
Contact Part Number | - | ||
Applicable Receptacle Contact Part Number | - | ||
Sensor | Limit Sensor | Provided | |
Slit Home Origin Sensor | Provided | ||
Home Sensor | - | ||
Part Number | Photomicrosensor: PM-L25 (Panasonic Industrial Devices SUNX Co., Ltd.) | ||
Power Supply Voltage | DC5~24V or less ±10% | ||
Current Consumption | 45mA or less (15mA or less per Sensor) | ||
Control Output | NPN Open Collector Output DC30V or less, 50mA or less Residual Voltage 2V or less (when load current is 50mA) Residual Voltage 1V or less (when load current is 16mA) | ||
Output Logic | Detecting (Dark): Output Transistor OFF (Non-Conducting) |
Type | Z-Axis Motorized Stages | Resolution(µm) | 2μm | Material | Aluminum |
---|---|---|---|---|---|
Guide | Cross Roller | Table feeding methods | Ball screw | Table Length(mm) | 70 |
Table width(mm) | 60 | Stroke (Z Distance)(mm) | 30 | Surface Treatment | Black Anodize |
Through Hole (Table Center Hole) | No | Load Capacity (Range)(N) | 5~30 | Allowable Load(N) | 29.4 |
Maximum Velocity(mm/sec) | 20 | Positioning Accuracy(µm) | 5 | Table Straightness(µm) | 3 |
Motor type | b:Stepper Motor (5-Phase Standard) | Cable | Cable not included |
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