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Lightweight, Compact, High accuracy X-axis stage.
Part Number
Configured Part Number is shown.
Part Number | - | Sensor | - | Motor | - | Cable |
XMPG830 XMPG8100 | - - | L R | - - | C QA | - - | N N |
Part Number | Sensor | Motor | Cable | Mechanical Standards | Accuracy Standards *1 | ||||||||
Type | No. | Cover Position | Stage Surface (mm) | Travel Distance (mm) | Weight (kg) | Unidirectional Positioning Accuracy (for a single axis) | Moment Rigidity ("/N•cm) | Pitching | Yawing | ||||
Pitching | Yawing | Rolling | |||||||||||
XMPG | 830 | L (Standard) R (Reversed) | C (Standard) QA (α-Step) | N (Cable not included (separately sold)) 2A (2m, α-Step) 5A (5m, α-Step) 2R (Robot Cable 2m, α-Step) 5R (Robot Cable 5m, α-Step) | 80X80 | 30 | 1.4 | 5µm | 0.07 | 0.06 | 0.02 | 25'' | 15'' |
870 | 80X130 | 70 | 1.8 | 0.01 | 0.014 | 0.01 | 25'' | 20'' | |||||
8100 | 80X160 | 100 | 2.1 | 10µm | 0.005 | 0.011 | 0.008 |
CAD Data download and 3D preview are not available because the part number has not yet been determined.
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Motor | Cable |
C | N |
N | 2A,5A,2R,5R |
No. | 830 | 870 | 8100 | |
Feed Screw | Ball Screw Ø8, Lead 1 | |||
Guide | Cross Roller Guide | |||
Resolution | Full | 1µm | ||
Half | 0.5µm | |||
Max. Speed | 10mm/sec | |||
Positioning repeatability | Within ±0.2µm | |||
Load Capacity | 196N | |||
Lost Motion | 1µm or less | |||
Backlash | 0.5µm or less | |||
Parallelism | 30µm or less | |||
Motion Parallelism | 10µm or less | 15µm or less |
Part Number | XMPG830 | XMPG870 | XMPG8100 | XMPG830-L-QA | XMPG870-L-QA | XMPG8100-L-QA | |
Motor | Type | 5-Phase Stepping Motor 0.75A/Phase (Oriental Motor Co., Ltd.) | α-Step Motor (Oriental Motor Co., Ltd.) | ||||
Part Number | C7214-9015-1(_38mm) | ARM46AC(_42mm) | |||||
Step Angle | 0.36° | 0.36° (When 1000P/R is set) | |||||
Driver Part Number | - | ARD-A | |||||
Connector | Part Number | SRCN2A21-16P (Japan Aviation Electronics Industry, Ltd.) | 172211-6 (Tyco Electronics Japan G.K.) | ||||
Applicable Receptacle Connector | SRCN6A21-16A (Japan Aviation Electronics Industry, Ltd.) | 171822-6 (Tyco Electronics Japan G.K.) | |||||
Contact Part Number | - | 170430-1 (Tyco Electronics Japan G.K.) | |||||
Applicable Receptacle Contact Part Number | - | 170205-1 (Tyco Electronics Japan G.K.) | |||||
Sensor | Limit Sensor | Provided | |||||
Slit Home Origin Sensor | Provided | ||||||
Home Sensor | Provided | ||||||
Part Number | Photomicro Sensor EE-SX673 (Omron Corporation) | ||||||
Power Supply Voltage | DC5~24V ±10% | ||||||
Current Consumption | 140mA or less (35mA per Sensor) | ||||||
Control Output | NPN Open Collector Output DC5~24V, 100mA or less Residual Voltage 0.8V or less (when load current is 100mA) Residual Voltage 0.4V or less (when load current is 40mA) | ||||||
Output Logic | Detecting (Dark): Output Transistor OFF (Non-Conducting) (Detection performed only by the Home Sensor) (While Detecting (Light In), Output Transistor OFF (Non-Conducting)) |
Type | X-Axis Motorized Stages | Motor, Motor Characteristics | α Stepper Motor | Resolution(µm) | 1μm |
---|---|---|---|---|---|
Material | Aluminum | Guide | Cross Roller | Table feeding methods | Ball screw |
Table width(mm) | 80 | Surface Treatment | Black Anodize | Through Hole (Table Center Hole) | No |
Load Capacity (Range)(N) | 100.1 or More | Allowable Load(N) | 196 | Maximum Velocity(mm/sec) | 10 |
Table Parallelism(µm) | 30 |
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